機(jī)械精密定位系統(tǒng)的研究與設(shè)計(jì)（本科畢業(yè)論文設(shè)計(jì)）
摘 要

設(shè)計(jì)了一種大行程精密工作臺定位控制系統(tǒng)。提出用直線音圈電機(jī)粗動控制與壓電陶瓷精動控制相結(jié)合的方法來完成對工作臺的定位控制，利用衍射干涉光柵技術(shù)進(jìn)行實(shí)時檢測，實(shí)現(xiàn)定位機(jī)構(gòu)的全閉環(huán)反饋控制，最后由計(jì)算機(jī)完成系統(tǒng)總體控制。該課題所研究的精密定位系統(tǒng)（硬件部分）由四部分組成:光路系統(tǒng)、定位臺與驅(qū)動機(jī)構(gòu)、光電檢測電路、運(yùn)算控制設(shè)備。在提出系統(tǒng)方案的基礎(chǔ)上，重點(diǎn)構(gòu)建了控制系統(tǒng)的軟件界面和基礎(chǔ)硬件控制系統(tǒng)即PLC控制系統(tǒng)。運(yùn)用Borland C++ Builder 6.0作為開發(fā)工具開發(fā)出了系統(tǒng)工作的控制界面。設(shè)備底層硬件控制的語言程序?yàn)镻LC控制程序，高層語言程序選用C語言，而這需要在計(jì)算機(jī)上編寫基本的程序?qū)崿F(xiàn)C語言與PLC進(jìn)行通信，來調(diào)用PLC控制程序?qū)崿F(xiàn)對步進(jìn)電機(jī)的運(yùn)動控制，即用C語言程序編寫程序與PLC通信。基于激光莫爾信號的精密定位裝置可獲得比較高定位精度，對精密加工等工程領(lǐng)域具有重要的實(shí)用價(jià)值最后,本文分析介紹了課題進(jìn)一步的研究方向。


類鍵詞: 工作臺，精密定位，莫爾信號, 粗動臺，微動臺

ABSTRACT

This paper presents a system for long-work range Precisely positioning of the worktable. In the system ,the combination of Linear voice coil actuator for coarse adjusting and the PZT for fine adjusting is applied in positioning of the worktable while the diffraction interfere grating technique is utilized for the feedback of the positional signal real time. That make the system is a closed-loop feedback system. The total system is controlled by computer. The subject of study by the precision positioning system (hardware) from four components: optical system, positioning table and the stepping-driven, photo detector circuit, Operational control equipment. Established a software interface of the control system and a hardware PLC control system, after proposed the program of system. Use Borland C + + Builder 6.0 as a development tool developed a system of control interface. The underlying hardware equipment procedures for the control of the language PLC control procedures, and high-level language C language selection procedures, which require on a computer program to prepare for the C language to communicate with the PLC to PLC control program calls for stepping motor control of the movement , Which uses C-language programming procedures and PLC communications. The experimental result shows the device which based on Moore laser signal can perform a high positioning accuracy .The approaches are of high value for accelerating the advancement of precision manufacturing technology. This paper analyses on the subject of further research.


Key Words: Worktables, Precision position ,
Moor signals , Macro movement table ,
Micro movement table

目 錄

中文摘要 Ⅰ
ABSTRACT Ⅱ
1.緒論.....................................................................1
1.1課題研究背景及意義......................................................1
1.2機(jī)械精密定位系統(tǒng)的應(yīng)用領(lǐng)域...... .......................................1
1.2.1微型機(jī)械制造、超精密加工.......... .................................1
1.2.2生物工程方面.............. .........................................1
1.2.3集成電路制造方面........ ...........................................1
1.2.4光纖對接方面........................................................2
1.2.5微機(jī)械零件的操作和裝配..............................................2
1.2.6醫(yī)療科學(xué)方面.........................................................2
1.3機(jī)械精密定位系統(tǒng)在國內(nèi)外的研究現(xiàn)狀.... ..................................2
2.定位系統(tǒng)的基本結(jié)構(gòu)......... ..........................................4
2.1驅(qū)動方式.............. ..................................................4
2.2載物臺.............. ....................................................4
2.3位移測量反饋系統(tǒng)....... .................................................5
2.4控制方式...................... ..........................................5
2.4.1人工控制........... .................................................5
2.4.2開環(huán)控制............. ...............................................6
2.4.3伺服反饋控制........... .............................................6
3.系統(tǒng)總體方案設(shè)計(jì)........... ..........................................7
3.1驅(qū)動與定位系統(tǒng)設(shè)計(jì).......... ............................................7
3.1.1 定位臺................... ..........................................8
3.1.2彈性解耦機(jī)構(gòu).............. ..........................................8
3.1.3 驅(qū)動部分................ ...........................................9
3.2 位置檢測反饋系統(tǒng)............ ...........................................11
3.2.1 光柵配置............................................................11
3.2.2 光電檢測電路設(shè)計(jì)........ ...........................................11
3.3控制系統(tǒng)................................................................15
3.3.1控制模型............ ...............................................15
3.3.2控制系統(tǒng)硬件......... ..............................................17
3.3.3控制系統(tǒng)軟件..