有毒物質(zhì)檢測(cè)的多孔硅化學(xué)傳感器設(shè)計(jì)

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摘要 人類處于高度信息化時(shí)代,如何快速的獲得信息處理信息已經(jīng)成為人們的迫切要求,作為信息獲取來源的傳感器,已經(jīng)在現(xiàn)代高度信息社會(huì)的科學(xué)技術(shù)發(fā)展中占據(jù)越來越重要的位置。傳感器技術(shù)是毫不遜色于任何一項(xiàng)技術(shù)的新技術(shù)，是未來信息社會(huì)的基礎(chǔ)性技術(shù)。傳感器被譽(yù)為電五官，而實(shí)際上傳感器已經(jīng)超出了人類的五官所能感知的信息的功能。目前，傳感器技術(shù)已經(jīng)應(yīng)用至國(guó)民經(jīng)濟(jì)的各個(gè)部門。
多孔硅是一種新興的室溫氣敏材料。由于其具有較高的比表面積，而且制備
過程簡(jiǎn)單，近年來被廣泛應(yīng)用于氣體檢測(cè)及環(huán)境監(jiān)視領(lǐng)域。多孔硅因?yàn)榫哂芯薮蟮谋缺砻娣e,又與IC工藝相容,檢測(cè)方法比較簡(jiǎn)單,容易制作成實(shí)用的傳感器,符合傳感器價(jià)格低廉,實(shí)用方便的要求,將多孔硅用于傳感器逐漸成為人們關(guān)注的熱點(diǎn)問題。
目前,多孔硅的研究主要集中在多孔硅制備微結(jié)構(gòu)表征、化學(xué)成分分析、多孔硅發(fā)光機(jī)理和特性探索以及多孔硅應(yīng)用等幾個(gè)方面。本文通過單槽電化學(xué)腐蝕法生長(zhǎng)多孔硅,并設(shè)計(jì)制備了多孔硅氣體傳感器。簡(jiǎn)單的討論了多孔硅的形成機(jī)理。通過實(shí)驗(yàn)發(fā)現(xiàn)隨著腐蝕電流密度的增加，其表面孔洞增多，深度增加，孔隙率變大，電阻升高。對(duì)比大孔硅和介孔硅，介孔硅具有較高的氣體靈敏度。
關(guān)鍵詞：大孔硅 介孔硅 氣敏傳感器


Porous silicon chemical sensor for detection of toxic substances
Abstract The human in the information age, how to quickly get the information processing information has become an urgent requirement, as the information source to obtain the sensor, has been the development of science and technology in modern information society occupies an increasingly important position. Sensor technology is a new technology not inferior to any one technology, is a basic technology in the future information society. The sensor is known as electronic features, and in fact sensor has been beyond the human facial features can perceive the information function. At present, the sensor technology has been applied to every department of national economy
Porous silicon is a new kind of room temperature gas sensing materials. Because of its high specific surface area, and the preparation, the process is simple, has been widely used in gas detection and environmental monitoring field. Porous silicon with large specific surface area, and compatibility with IC technology, the detection method is simple, easy to make into a practical sensor with sensor, low price, convenient and practical requirements, the porous silicon sensor for gradually become the focus of people's attention.
At present, study of porous silicon are mainly concentrated in the preparation of porous silicon microstructure, chemical composition analysis, porous silicon luminescence mechanism and characteristics of porous silicon exploration and application etc.. In this paper, through a single tank electrochemical corrosion growth of porous silicon, and the design of porous silicon gas sensor was prepared. Simple discussion of the mechanism of porous silicon. Through the experiments it is found that with the increase of corrosion current density, the surface pores increase, increasing depth, porosity, resistance increased. Comparison of macroporous silicon and mesoporous silica, mesoporous silica has higher gas sensitivity.


Key words: Mesoporous macroporous silicon Kong Gui gas sensor

目錄
1.1氣敏傳感器的概述 1
1.1.1 氣敏傳感器的定義 1
1.1.2 氣敏傳感器的分類 2
1.1.3 氣敏傳感器的主要特性參數(shù) 2
1.2幾種常見的氣敏傳感器 5
1.2.1 光學(xué)式氣體傳感器 6
1.2.2 半導(dǎo)體式氣體傳感器 6
1.2.3 場(chǎng)效應(yīng)管式氣體傳感器 7
1.2.4 基于壓電的氣體傳感器 8
1.3多孔硅氣敏傳感器 8
1.3.1 多孔硅簡(jiǎn)介 8
1.3.2多孔硅氣敏傳感器的發(fā)展趨勢(shì) 10
1.4對(duì)多孔硅應(yīng)用的研究 11
第二章 原理介紹 13
2.1 多孔硅的制備方法 13
2.1.1電化學(xué)腐蝕法原理 13
2.1.2 化學(xué)腐蝕法 15
2.1.3電偶腐蝕法 16
2.2 多孔硅形成機(jī)理 16
2.2.1 空間電荷區(qū)模型 16
2.2.2擴(kuò)散限制（DLA）模型 18
2.2.3 Beale 模型 19
第三章 大孔硅氣敏傳感器的制備和性能研究 24
3.3.1 硅片清洗 29
3.3.2 電化學(xué)腐蝕制備大孔硅 29
3.3電極的制備 31
3.4介孔硅氣敏傳感器的制備 33
結(jié)論 35
致謝 36
參考文獻(xiàn)： 37